Nitinol Thin Film Three-dimensional Devices – Fabrication and Applications
نویسنده
چکیده
A method has been developed in which three-dimensional structures of nitinol thin film are fabricated using a sequence of processes that involve alternating sputter deposition of multiple layers and Micro-ElectroMechanical-Systems (MEMS) photolithographic steps. The multiple-layered nitinol parts are transformed into integral three-dimensional shapes by “shape-setting” annealing process using steel mandrels. This method eliminates the difficulties of joining, welding or bonding of nitinol films. Stent-like-devices such as cylinders, cones and hemispheres of few microns thick TiNi thin film have been fabricated and characterized. Micron-scale fenestration patterns fabricated using MEMS techniques enable to design and fabricate wide spectrum of nitinol thin film devices for medical industries and others.
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